MEMS

Along with his graduate students, Richard Muller, professor of EECS, produces the first electrically powered, microscopic motor, no larger than the width of a human hair. This micro-machine helps spawn the field of micro-electro-mechanical systems (MEMS).

Muller joins with fellow EECS professor Richard M. White to found the Berkeley Sensor & Actuator Center, which conducts interdisciplinary research on micro- and nanoscale sensors and moving mechanical elements.

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